EMERGING TRENDS AND FUTURE PROSPECTS IN NANOSCALE MEASUREMENTS AND NANOMETROLOGY
Keywords:
nanometrology, nanoscale measurements, calibration, precision measurement, computational metrologyAbstract
Precise measurement at the nanoscale is fundamental for advances in nanotechnology, enabling accurate material characterization, quality assurance, and development of nanoscale devices. This paper provides a comprehensive review of the latest developments in nanometrology over the past five years, highlighting emerging methodologies, instrumentation advances, and future research directions. Recent progress in computational approaches, calibration techniques, and precision displacement measurement strategies reveals new opportunities for enhanced measurement reliability and scalability. The analysis also identifies persistent challenges and outlines priorities for future research to support industrial and scientific nanotechnology applications.
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